From tberg at snf.stanford.edu Fri Feb 2 07:21:07 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 2 Feb 2007 07:21:07 -0800 Subject: Shutdown epi2 SNF 2007-01-31 15:02:24: lamp failed upper inner Message-ID: Did lamp check, reinstalled cables lamp fault gone From maurice at snf.stanford.edu Fri Feb 2 16:29:48 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 2 Feb 2007 16:29:48 -0800 Subject: Shutdown epi2 SNF 2007-01-30 16:29:35: Main N2 pressure error Message-ID: Sean and Ted fixed dopant mixer problem From mtang at snf.stanford.edu Mon Feb 5 09:11:27 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 5 Feb 2007 09:11:27 -0800 Subject: Problem epi2 SNF 2006-11-27 09:40:12: Under Tier II qualification Message-ID: It'a up!! Interested users, see Maurice. From tberg at snf.stanford.edu Wed Feb 7 06:13:58 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 7 Feb 2007 06:13:58 -0800 Subject: Shutdown epi2 SNF 2007-02-07 06:13:58: HCL Cylinder MT Message-ID: From tberg at snf.stanford.edu Wed Feb 7 09:35:44 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 7 Feb 2007 09:35:44 -0800 Subject: Shutdown epi2 SNF 2007-02-07 06:13:58: HCL Cylinder MT Message-ID: Replaced HCl cylinder From bmurray at stanford.edu Wed Feb 7 09:55:50 2007 From: bmurray at stanford.edu (Bill Murray) Date: Wed, 07 Feb 2007 09:55:50 -0800 Subject: Test Message-ID: <45CA12A6.6060109@stanford.edu> This is a test. Please ignore. From tberg at snf.stanford.edu Wed Feb 7 10:19:48 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 7 Feb 2007 10:19:48 -0800 Subject: Comment epi2 SNF 2007-02-07 10:19:48: HCL looks OK Message-ID: From grahamab at snf.stanford.edu Thu Feb 8 14:50:16 2007 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 8 Feb 2007 14:50:16 -0800 Subject: Problem epi2 SNF 2007-02-08 14:50:15: temperature fault Message-ID: During cleaning recipe there was a lower platform temperature fault and machine immediately went to cold idle. During deposition recipe the upper platform temperature was about 40degC higher than the setpoint so I don't know if they're related problems. Previous tests only had temperature fluctuations of 5-6 degC at most. Also, the fault occurred almost simultaneously with epi (epi1) alarming for being out of DCS but this may just be a coincidence. From tberg at snf.stanford.edu Fri Feb 9 07:05:30 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 9 Feb 2007 07:05:30 -0800 Subject: Comment epi2 SNF 2007-02-07 10:19:48: HCL looks OK Message-ID: noted From maurice at snf.stanford.edu Fri Feb 9 11:01:01 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 Feb 2007 11:01:01 -0800 Subject: Problem epi2 SNF 2007-02-08 14:50:15: temperature fault Message-ID: Both systems are tied to the same DCSline...so epi2 probably shut down because it was out ofDCS...like epi1. Thanks for including that bit of info. It saves a lot of time trying to figure out what is going on. The cabinet has been reset. From maurice at snf.stanford.edu Tue Feb 13 15:34:53 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 13 Feb 2007 15:34:53 -0800 Subject: Comment epi2 SNF 2007-02-13 15:34:52: Ge deposition started Message-ID: We have rec'ed an Ge etch recipe from Yonah. Ray, Serene and Duygu developing a base Ge recipe. From maurice at snf.stanford.edu Tue Feb 13 15:40:11 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 13 Feb 2007 15:40:11 -0800 Subject: Comment epi2 SNF 2007-02-13 15:40:10: H2 anneal optimization Message-ID: Rishi has successfully done silicon feature smoothing using H2 at 1100c for 10min with H2 flow at 20 L/min. He will continue to characterize and optimize the anneal process.