Problem epi2 SNF 2007-02-08 14:50:15: temperature fault

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Thu Feb 8 14:50:16 PST 2007


During cleaning recipe there was a lower platform temperature fault and machine immediately went to cold idle.  During deposition recipe the upper platform temperature was about 40degC higher than the setpoint so I don't know if they're related problems.  Previous tests only had temperature fluctuations of 5-6 degC at most.  Also, the fault occurred almost simultaneously with epi (epi1) alarming for being out of DCS but this may just be a coincidence.




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