Comment epi2 SNF 2007-02-13 15:40:10: H2 anneal optimization
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Tue Feb 13 15:40:11 PST 2007
Rishi has successfully done silicon feature smoothing using H2 at 1100c for 10min with H2 flow at 20 L/min.
He will continue to characterize and optimize the anneal process.
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