From maurice at snf.stanford.edu Fri Jan 5 16:10:09 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 5 Jan 2007 16:10:09 -0800 Subject: Shutdown epi2 SNF 2007-01-05 16:10:09: 2 problems Message-ID: 1. Loadloak A will not close 2. Chamber wont pump below 1 torr...can't start up or go offline From maurice at snf.stanford.edu Mon Jan 8 11:08:12 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Jan 2007 11:08:12 -0800 Subject: Shutdown epi2 SNF 2007-01-05 16:10:09: 2 problems Message-ID: Ceaser aborted loading sequecer to reset system From maurice at snf.stanford.edu Mon Jan 8 11:33:23 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Jan 2007 11:33:23 -0800 Subject: Shutdown epi2 SNF 2007-01-08 11:33:20: heater contactor off Message-ID: From maurice at snf.stanford.edu Mon Jan 8 12:02:23 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 8 Jan 2007 12:02:23 -0800 Subject: Shutdown epi2 SNF 2007-01-08 11:33:20: heater contactor off Message-ID: Brought system down to inert idle, cold indle and back to hot idle twice. Seems ok now. From maurice at snf.stanford.edu Thu Jan 11 13:21:06 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 11 Jan 2007 13:21:06 -0800 Subject: Comment epi2 SNF 2007-01-11 13:21:05: creating user recipes Message-ID: Working with Gary Yama and Andrew to create Si selective growths From maurice at snf.stanford.edu Thu Jan 11 16:38:28 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 11 Jan 2007 16:38:28 -0800 Subject: Shutdown epi2 SNF 2007-01-11 16:38:28: wafer stuck in chamber Message-ID: System aborted the run because of a pressure deviation. System now won't pump below 1 torr. Since system can't pump below 1 torr, system wont go online. I was onl;y able to get the system online by changing the pumpdown base (I changed it to 20 torr). I don't know how to manually remove wafer from chamber From maurice at snf.stanford.edu Fri Jan 12 10:58:41 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Jan 2007 10:58:41 -0800 Subject: Comment epi2 SNF 2007-01-12 10:58:40: aborts during run Message-ID: pressure deviation system doesn't pump to 1 torr From maurice at snf.stanford.edu Fri Jan 12 16:58:38 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Jan 2007 16:58:38 -0800 Subject: Comment epi2 SNF 2007-01-12 16:58:38: AMat maint coming on Tues Message-ID: AMat coming on Tues to look at pumping issue and loadlock door sensor. From tberg at snf.stanford.edu Wed Jan 17 12:54:44 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 17 Jan 2007 12:54:44 -0800 Subject: Shutdown epi2 SNF 2007-01-17 12:54:43: Chamber pump is bad Message-ID: Sent out for repair. System down From tberg at snf.stanford.edu Tue Jan 30 15:06:17 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 30 Jan 2007 15:06:17 -0800 Subject: Shutdown epi2 SNF 2007-01-17 12:54:43: Chamber pump is bad Message-ID: Pump Rebuilt and Replaced in cold idle From tberg at snf.stanford.edu Tue Jan 30 15:06:42 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 30 Jan 2007 15:06:42 -0800 Subject: Comment epi2 SNF 2007-01-12 10:58:40: aborts during run Message-ID: Pump replaced From tberg at snf.stanford.edu Tue Jan 30 15:06:59 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 30 Jan 2007 15:06:59 -0800 Subject: Comment epi2 SNF 2007-01-12 16:58:38: AMat maint coming on Tues Message-ID: Noted From maurice at snf.stanford.edu Tue Jan 30 16:28:56 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 30 Jan 2007 16:28:56 -0800 Subject: Shutdown epi2 SNF 2007-01-11 16:38:28: wafer stuck in chamber Message-ID: wafer removed...pump replaced From maurice at snf.stanford.edu Tue Jan 30 16:29:36 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 30 Jan 2007 16:29:36 -0800 Subject: Shutdown epi2 SNF 2007-01-30 16:29:35: Main N2 pressure error Message-ID: From maurice at snf.stanford.edu Wed Jan 31 15:02:25 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 31 Jan 2007 15:02:25 -0800 Subject: Shutdown epi2 SNF 2007-01-31 15:02:24: lamp failed upper inner Message-ID: