Shutdown epi2 SNF 2007-01-11 16:38:28: wafer stuck in chamber

maurice at snf.stanford.edu maurice at snf.stanford.edu
Thu Jan 11 16:38:28 PST 2007


System aborted the run because of a pressure deviation.
System now won't pump below 1 torr.
Since system can't pump below 1 torr, system wont go online.
I was onl;y able to get the system online by changing the pumpdown base (I changed it to 20 torr).
 I don't know how to manually remove wafer from chamber




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