Shutdown epi2 SNF 2007-01-11 16:38:28: wafer stuck in chamber
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Tue Jan 30 16:28:56 PST 2007
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Shutdown epi2 SNF 2007-01-11 16:38:28: wafer stuck in chamber
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Comment epi2 SNF 2007-01-12 10:58:40: aborts during run
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wafer removed...pump replaced
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Shutdown epi2 SNF 2007-01-11 16:38:28: wafer stuck in chamber
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Comment epi2 SNF 2007-01-12 10:58:40: aborts during run
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