From jimbond at snf.stanford.edu Thu Jul 5 13:04:33 2007 From: jimbond at snf.stanford.edu (jimbond at snf.stanford.edu) Date: Thu, 5 Jul 2007 13:04:33 -0700 Subject: Shutdown epi2 SNF 2007-07-05 13:04:28: Heater Contactor Off Message-ID: When bringing the chamber from Cold Idle to Hot Idle, got error message "Heater Contactor Off" and "low water flow". From maurice at snf.stanford.edu Thu Jul 5 13:15:36 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 5 Jul 2007 13:15:36 -0700 Subject: Shutdown epi2 SNF 2007-07-05 13:04:28: Heater Contactor Off Message-ID: It is normal for Water flow to fault if it is starting cold. Reset system and start up again. From nevran at snf.stanford.edu Fri Jul 13 10:26:34 2007 From: nevran at snf.stanford.edu (nevran at snf.stanford.edu) Date: Fri, 13 Jul 2007 10:26:34 -0700 Subject: Problem epi2 SNF 2007-07-13 10:26:33: Chamber isolated Message-ID: On 7/12/07 chamberA went offline and got isolated. Recovered by putting it back online. From eenriquez at snf.stanford.edu Fri Jul 13 12:49:28 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Jul 2007 12:49:28 -0700 Subject: Problem epi2 SNF 2007-07-13 10:26:33: Chamber isolated Message-ID: User fixed the problem From renshen at snf.stanford.edu Mon Jul 16 13:47:17 2007 From: renshen at snf.stanford.edu (renshen at snf.stanford.edu) Date: Mon, 16 Jul 2007 13:47:17 -0700 Subject: Comment epi2 SNF 2007-07-16 13:47:16: Water flow problem Message-ID: Had a water flow error during switching from cold idle to hot idle. reset and OK now.. From yuhykr at snf.stanford.edu Wed Jul 18 01:44:29 2007 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Wed, 18 Jul 2007 01:44:29 -0700 Subject: Problem epi2 SNF 2007-07-18 01:44:28: isolated state Message-ID: wafer is in the chamber A. From eenriquez at snf.stanford.edu Wed Jul 18 10:45:05 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Jul 2007 10:45:05 -0700 Subject: Problem epi2 SNF 2007-07-18 01:44:28: isolated state Message-ID: Cleared errors. Unloaded user's wafer and place in his box. From cbaxter at snf.stanford.edu Wed Jul 18 13:12:20 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 18 Jul 2007 13:12:20 -0700 Subject: Shutdown epi2 SNF 2007-07-18 13:12:19: Checking toxic gas on gas vault Message-ID: From eenriquez at snf.stanford.edu Thu Jul 19 10:19:10 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 19 Jul 2007 10:19:10 -0700 Subject: Shutdown epi2 SNF 2007-07-18 13:12:19: Checking toxic gas on gas vault Message-ID: The arsine sensor has been replaced and the cylinder turned back on. Verified flow at the system. The gas designation on the AMAT system for the N-dopant (Arsine and Phosphine) is D-Dopant1. From mdickey at snf.stanford.edu Fri Jul 20 06:18:53 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 20 Jul 2007 06:18:53 -0700 Subject: Shutdown epi2 SNF 2007-07-20 06:18:52: bottle change Message-ID: down for HCL bottle change From mdickey at snf.stanford.edu Fri Jul 20 07:57:37 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 20 Jul 2007 07:57:37 -0700 Subject: Shutdown epi2 SNF 2007-07-20 06:18:52: bottle change Message-ID: bottle change done From eenriquez at snf.stanford.edu Mon Jul 23 09:23:41 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Jul 2007 09:23:41 -0700 Subject: Comment epi2 SNF 2007-07-16 13:47:16: Water flow problem Message-ID: Water flow now ok From eenriquez at snf.stanford.edu Mon Jul 23 09:24:39 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Jul 2007 09:24:39 -0700 Subject: Comment epi2 SNF 2007-06-15 14:37:55: DCS gas test Message-ID: DCS flow is stable now. From eenriquez at snf.stanford.edu Mon Jul 23 09:24:59 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Jul 2007 09:24:59 -0700 Subject: Comment epi2 SNF 2007-05-30 08:19:25: Switched system control to front of system Message-ID: OK From seymour at snf.stanford.edu Mon Jul 23 09:46:02 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 23 Jul 2007 09:46:02 -0700 Subject: Problem epi2 SNF 2007-07-23 09:46:02: turning off 1% Phosphine for 24 hours Message-ID: I need to replace the cylinder restraint chain which requires cylinder removal and a 24 hour leak check. From seymour at snf.stanford.edu Tue Jul 24 08:38:32 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 24 Jul 2007 08:38:32 -0700 Subject: Problem epi2 SNF 2007-07-23 09:46:02: turning off 1% Phosphine for 24 hours Message-ID: leak check passed phosphine back on From jrjain at snf.stanford.edu Thu Jul 26 21:59:23 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Thu, 26 Jul 2007 21:59:23 -0700 Subject: Problem epi2 SNF 2007-07-26 21:59:20: Minor Warning Message-ID: Epi Chamber A Wafer Out of Pocket Minor Warning From cbaxter at snf.stanford.edu Mon Jul 30 08:05:56 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 30 Jul 2007 08:05:56 -0700 Subject: Problem epi2 SNF 2007-07-26 21:59:20: Minor Warning Message-ID: Verified wafer handoff could not duplicate error.