Shutdown epi2 SNF 2007-07-05 13:04:28: Heater Contactor Off

jimbond at snf.stanford.edu jimbond at snf.stanford.edu
Thu Jul 5 13:04:33 PDT 2007


When bringing the chamber from Cold Idle to Hot Idle, got error message "Heater Contactor Off" and "low water flow".




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