Shutdown epi2 SNF 2007-07-18 13:12:19: Checking toxic gas on gas vault

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Jul 19 10:19:10 PDT 2007


The arsine sensor has been replaced and the cylinder turned back on.  Verified flow at the system.  The gas designation on the AMAT system for the N-dopant (Arsine and Phosphine) is D-Dopant1.




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