Problem epi2 SNF 2007-06-01 00:40:21: System Cabinet door open error

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jun 1 09:20:49 PDT 2007


Closed system cabinet door and reset error.  Ran daily leak rate check and cycled the wafer lift with no problems.  Leak rate has been less than 3 mT/min.




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