Shutdown epi2 SNF 2007-06-03 22:41:36: Wafers still stuck due to lift error

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jun 4 10:46:37 PDT 2007


Pumped down chamber and placed online.  Unloaded user's wafer and placed them in his cassette (slot 19 and 20).  Cycled the lift several times with no problems.




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