Problem epi2 SNF 2007-06-07 19:03:54: Out of pocket warning

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jun 8 08:40:47 PDT 2007


No problem found.  One possible cause for the error was film roughness which caused the wafer to be only slightly reflective.  I do not want to increase the wafer sensor gain just yet since this is the first time that this problem has occured.  We will continue to monitor the system to see if this becomes a major problem.




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