Problem epi2 SNF 2007-06-12 19:25:39: Faults

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Tue Jun 12 19:25:40 PDT 2007


The following faults were given during a standard SiGe dep run.
1) Chamber A LOWER temperature setpoint deviation fault.
Process was aborted, and chamber went to HYDROGEN PURGE state
2) Fatal fault of wafer from Load Lock A slot 4
3) The Chamber A is not ready to send a wafer




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