Shutdown epi2 SNF 2007-06-13 18:23:31: Fault

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Wed Jun 13 18:23:32 PDT 2007

Previous message: Shutdown epi2 SNF 2007-06-12 19:36:29: See previous problem report on faults
Next message: Shutdown epi2 SNF 2007-06-13 18:23:31: Fault
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Chamber A DCS flow deviated by 199% (actually more, but the software may only tell this much).  Tried multiple fixes with Elmer and Maurice.  Equipment still having problems.

Previous message: Shutdown epi2 SNF 2007-06-12 19:36:29: See previous problem report on faults
Next message: Shutdown epi2 SNF 2007-06-13 18:23:31: Fault
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the epi2-pcs mailing list