Shutdown epi2 SNF 2007-06-13 18:23:31: Fault

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Wed Jun 13 18:23:32 PDT 2007


Chamber A DCS flow deviated by 199% (actually more, but the software may only tell this much).  Tried multiple fixes with Elmer and Maurice.  Equipment still having problems.




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