Problem epi2 SNF 2007-06-14 12:54:41: DCS Fluctuation

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Jun 14 14:32:13 PDT 2007


Increased DCS line heater temperature from 115 F to 130 F. Flowed 200 sccm of DCS for 6 minutes with no deviation (line pressure is 9 psi).




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