Problem epi2 SNF 2007-06-18 12:43:52: ChA error

gunjim at gunjim at
Mon Jun 18 12:43:53 PDT 2007

Showed 'ChA is not ready to send a wafer.' --> 'Fatal fault of wafer from LLA slot3 - 1282' and went to cold idle. This happened when the 3rd wafer has finished the recipe and remained in ChA.

More information about the epi2-pcs mailing list