Problem epi2 SNF 2007-06-18 12:43:52: ChA error

gunjim at snf.stanford.edu gunjim at snf.stanford.edu
Mon Jun 18 12:43:53 PDT 2007


Showed 'ChA is not ready to send a wafer.' --> 'Fatal fault of wafer from LLA slot3 - 1282' and went to cold idle. This happened when the 3rd wafer has finished the recipe and remained in ChA.




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