Problem epi2 SNF 2007-06-18 12:43:52: ChA error

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jun 18 14:10:27 PDT 2007


Wafer faulted for temperature deviation.  User was able to unload "bad" wafer and continue processing the rest of her wafers. 




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