From junil at snf.stanford.edu Wed Mar 7 21:01:02 2007 From: junil at snf.stanford.edu (junil at snf.stanford.edu) Date: Wed, 7 Mar 2007 21:01:02 -0800 Subject: Problem epi2 SNF 2007-03-07 21:01:01: CH-A main scrubber fault, wafer mapping error Message-ID: From tberg at snf.stanford.edu Thu Mar 8 07:15:47 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 8 Mar 2007 07:15:47 -0800 Subject: Problem epi2 SNF 2007-03-07 21:01:01: CH-A main scrubber fault, wafer mapping error Message-ID: REset burn box back in inert Idle From maurice at snf.stanford.edu Thu Mar 8 12:00:37 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 8 Mar 2007 12:00:37 -0800 Subject: Shutdown epi2 SNF 2007-03-08 12:00:36: not mapping wafers correctly Message-ID: From maurice at snf.stanford.edu Thu Mar 8 15:59:50 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 8 Mar 2007 15:59:50 -0800 Subject: Problem epi2 SNF 2007-03-08 15:59:49: wafer stuck in transfer chamber Message-ID: From maurice at snf.stanford.edu Fri Mar 9 11:41:04 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 Mar 2007 11:41:04 -0800 Subject: Problem epi2 SNF 2007-03-08 15:59:49: wafer stuck in transfer chamber Message-ID: Ted removed wafer From maurice at snf.stanford.edu Fri Mar 9 11:42:40 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 Mar 2007 11:42:40 -0800 Subject: Problem epi2 SNF 2007-03-09 11:42:39: Wafer not on blade Message-ID: Wafer is not being moved to the transfer chamber. >From either cassette. From maurice at snf.stanford.edu Fri Mar 9 14:49:41 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 Mar 2007 14:49:41 -0800 Subject: Comment epi2 SNF 2007-03-09 14:49:41: Amat coming 3/10/07 Message-ID: Sean from Amat is coming tomorrow (yes, on a Sat) to look at the wafer handling issue. From maurice at snf.stanford.edu Tue Mar 13 15:36:33 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 13 Mar 2007 15:36:33 -0700 Subject: Comment epi2 SNF 2007-03-13 15:36:33: Broken Blade Message-ID: AMAT Sean came on Sat and found that the blade was broken (the blades moves the wafer from the load lock to the chamber). Sean from AMAT is trying to find out how to get one. The problem is that we have a six inch epi reactor that has a four inch kit installed. They don't stock that kit. There is an AMAT drawing and an AMAT part number...so it can be made again. But we may have to wait for them to figure out the process of having it made. From maurice at snf.stanford.edu Wed Mar 28 11:10:43 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 Mar 2007 11:10:43 -0700 Subject: Comment epi2 SNF 2007-03-28 11:10:42: Amat working on Blade Message-ID: Sean from AMAT was here last night and is here now working on the blade. He thinks it will be up this afternoon. From tberg at stanford.edu Wed Mar 28 12:41:49 2007 From: tberg at stanford.edu (Ted Berg) Date: Wed, 28 Mar 2007 12:41:49 -0700 Subject: Sorry suceptor ring is cracked Message-ID: <460AC4FD.9070105@stanford.edu> Sorry after blade adjustment we checked chaber and found the suceptor ring was cracked . ordering parts ted From maurice at snf.stanford.edu Thu Mar 29 10:57:15 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 29 Mar 2007 10:57:15 -0700 Subject: Comment epi2 SNF 2007-03-29 10:57:15: update: Susceptor ring ordered Message-ID: AMAT Sean called this morning to let us know that the ring has been ordered and he expects to has it early next week. Once he has it he will get with Ted to install it.