Problem epi2 SNF 2007-03-07 21:01:01: CH-A main scrubber fault, wafer mapping error
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Thu Mar 8 07:15:47 PST 2007
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Problem epi2 SNF 2007-03-07 21:01:01: CH-A main scrubber fault, wafer mapping error
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REset burn box back in inert Idle
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Problem epi2 SNF 2007-03-07 21:01:01: CH-A main scrubber fault, wafer mapping error
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Shutdown epi2 SNF 2007-03-08 12:00:36: not mapping wafers correctly
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