March 2007 Archives by thread

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Starting: Wed Mar 7 21:01:02 PST 2007
Ending: Thu Mar 29 10:57:15 PDT 2007
Messages: 11

• Problem epi2 SNF 2007-03-07 21:01:01: CH-A main scrubber fault, wafer mapping error   junil at snf.stanford.edu
  • Problem epi2 SNF 2007-03-07 21:01:01: CH-A main scrubber fault, wafer mapping error   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2007-03-08 12:00:36: not mapping wafers correctly   maurice at snf.stanford.edu
• Problem epi2 SNF 2007-03-08 15:59:49: wafer stuck in transfer chamber   maurice at snf.stanford.edu
  • Problem epi2 SNF 2007-03-08 15:59:49: wafer stuck in transfer chamber   maurice at snf.stanford.edu
• Problem epi2 SNF 2007-03-09 11:42:39: Wafer not on blade   maurice at snf.stanford.edu
• Comment epi2 SNF 2007-03-09 14:49:41: Amat coming 3/10/07   maurice at snf.stanford.edu
• Comment epi2 SNF 2007-03-13 15:36:33: Broken Blade   maurice at snf.stanford.edu
• Comment epi2 SNF 2007-03-28 11:10:42: Amat working on Blade   maurice at snf.stanford.edu
• Sorry suceptor ring is cracked   Ted Berg
• Comment epi2 SNF 2007-03-29 10:57:15: update: Susceptor ring ordered   maurice at snf.stanford.edu

Last message date: Thu Mar 29 10:57:15 PDT 2007
Archived on: Sun Dec 23 08:52:45 PST 2012

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