From eenriquez at snf.stanford.edu Tue May 1 08:57:40 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 May 2007 08:57:40 -0700 Subject: Shutdown epi2 SNF 2007-05-01 08:57:39: Burnbox problem Message-ID: Unable to ignite the burnbox. Might be a dirty/ bad spark plugs. From eenriquez at snf.stanford.edu Wed May 2 18:54:25 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 May 2007 18:54:25 -0700 Subject: Comment epi2 SNF 2007-05-02 18:54:23: Update Message-ID: Burn box part has been ordered and should be in by tomorrow 5/3. From eenriquez at snf.stanford.edu Thu May 3 12:39:29 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 May 2007 12:39:29 -0700 Subject: Shutdown epi2 SNF 2007-05-01 08:57:39: Burnbox problem Message-ID: Replaced burnbox igniter plugs. Burnbox now OK. Chamber A is in idle and needs to be qualified. From eenriquez at snf.stanford.edu Thu May 3 12:39:44 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 May 2007 12:39:44 -0700 Subject: Comment epi2 SNF 2007-05-02 18:54:23: Update Message-ID: Replaced burnbox igniter plugs. Burnbox now OK. Chamber A is in idle and needs to be qualified. From eenriquez at snf.stanford.edu Thu May 3 12:40:50 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 May 2007 12:40:50 -0700 Subject: Problem epi2 SNF 2007-04-30 14:09:26: User is testing the system Message-ID: User test was OK. Changes to the recipe is OK with Maurice. From rwoo at snf.stanford.edu Sun May 6 21:08:13 2007 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Sun, 6 May 2007 21:08:13 -0700 Subject: Shutdown epi2 SNF 2007-05-06 21:08:13: Wafer not on blade error Message-ID: 'Wafer not on blade' error - system was trying to transfer wafer from LL-A to start processing. LL-A to X-fer slit open so LL-A door cannot be opened. Please move wafers (should be 13 in total) to plastic box on table. Please try to handle carefully as these are important wafers! From eenriquez at snf.stanford.edu Mon May 7 12:18:25 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 7 May 2007 12:18:25 -0700 Subject: Shutdown epi2 SNF 2007-05-06 21:08:13: Wafer not on blade error Message-ID: Unloaded user's wafers and placed them in his box. Cycled 10 wafers but unable to duplicate the problem. Maurice is cycling some more wafers. From nevran at snf.stanford.edu Tue May 8 19:31:01 2007 From: nevran at snf.stanford.edu (nevran at snf.stanford.edu) Date: Tue, 8 May 2007 19:31:01 -0700 Subject: Shutdown epi2 SNF 2007-05-08 19:31:00: Chamber A Bulb Failures Message-ID: Faults during ETCHCOAT-CHA. 1) Chamber A failed to reach end condition for Step 4 (which is a Ramp to 1130 before bake) 2) Chamber A bulb failed in UPPER INNER zone after recipe aborted 3) Chamber A bulb failed in LOWER INNER zone From maurice at snf.stanford.edu Wed May 9 10:18:16 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 9 May 2007 10:18:16 -0700 Subject: Shutdown epi2 SNF 2007-05-08 19:31:00: Chamber A Bulb Failures Message-ID: Lamps checked out ok. System aborted...this turns off lamps...propram sees lamps off and reports lamp failure...a bug in the program? The ramp step in the etch program is now changed from a" timed" step to "hold in step until temp reached" From jrjain at snf.stanford.edu Thu May 10 11:01:13 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Thu, 10 May 2007 11:01:13 -0700 Subject: Shutdown epi2 SNF 2007-05-10 11:01:12: Chamber A Fault Message-ID: Main Scrubber Fault - Manual Gas Flows not allowed From maurice at snf.stanford.edu Thu May 10 11:10:53 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 May 2007 11:10:53 -0700 Subject: Shutdown epi2 SNF 2007-05-10 11:01:12: Chamber A Fault Message-ID: scrubber reset From rwoo at snf.stanford.edu Thu May 10 19:10:53 2007 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Thu, 10 May 2007 19:10:53 -0700 Subject: Problem epi2 SNF 2007-05-10 19:10:52: need clip for quartz wand Message-ID: We really need a place to securely hang the quartz wand. As it is now, users are left with the choice of either putting the wand in a precarious position without the quartz tip touching anything, or putting the wand in a more secure position with the tip touching the monitor or table. This is a serious problem as the system is becoming more heavily used. From jrjain at snf.stanford.edu Fri May 11 11:09:55 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Fri, 11 May 2007 11:09:55 -0700 Subject: Problem epi2 SNF 2007-05-11 11:09:55: Top to Bottom Temp Control Message-ID: ~15-35C temperature difference between top and bottom of wafer. This is far too large and results in marked changes in dep rate, composition, and quality for SiGe films compared to previous runs. Bulb tests should probably be done with some replaced. From eenriquez at snf.stanford.edu Fri May 11 14:30:33 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 May 2007 14:30:33 -0700 Subject: Problem epi2 SNF 2007-05-10 19:10:52: need clip for quartz wand Message-ID: Installed a temporary wafer wand holder. We will order a wand holder next week. From eenriquez at snf.stanford.edu Fri May 11 14:31:50 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 May 2007 14:31:50 -0700 Subject: Comment epi2 SNF 2007-05-11 14:31:50: Heater lamps update Message-ID: Ordered heater lamps. Should be in by next Friday. From maurice at snf.stanford.edu Tue May 15 13:33:40 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 15 May 2007 13:33:40 -0700 Subject: Shutdown epi2 SNF 2007-05-15 13:33:39: inspecting lamps/dome coating Message-ID: From maurice at snf.stanford.edu Tue May 15 16:15:11 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 15 May 2007 16:15:11 -0700 Subject: Comment epi2 SNF 2007-05-15 16:15:10: Dome coated Message-ID: 3 Ge etches and 2 "Big Etch" Si etches didn't clear the dome. cbaxter will contact AMAT for possible solutions From eenriquez at snf.stanford.edu Wed May 16 12:18:16 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 May 2007 12:18:16 -0700 Subject: Comment epi2 SNF 2007-05-16 12:18:15: Dome update Message-ID: Vented the chamber and wet cleaned. Dome currently being cleaned and should be done by 3 pm. From maurice at snf.stanford.edu Wed May 16 14:46:13 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 May 2007 14:46:13 -0700 Subject: Comment epi2 SNF 2007-04-23 22:50:16: 2 wafers in LL B Message-ID: logged From eenriquez at snf.stanford.edu Wed May 16 18:00:04 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 May 2007 18:00:04 -0700 Subject: Shutdown epi2 SNF 2007-05-15 13:33:39: inspecting lamps/dome coating Message-ID: Mike D. cleaned dome in HF/Nitric. Reassembled chamber with no problems. Last chamber leak rate test was 6.6 mT/min; need to be less than 5 mT/min. Will leave in Hot idle over night. Maurice will run a qual in the morning. From eenriquez at snf.stanford.edu Wed May 16 18:00:27 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 May 2007 18:00:27 -0700 Subject: Comment epi2 SNF 2007-05-15 16:15:10: Dome coated Message-ID: Mike D. cleaned dome in HF/Nitric. Reassembled chamber with no problems. Last chamber leak rate test was 6.6 mT/min; need to be less than 5 mT/min. Will leave in Hot idle over night. Maurice will run a qual in the morning. From eenriquez at snf.stanford.edu Wed May 16 18:00:36 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 May 2007 18:00:36 -0700 Subject: Comment epi2 SNF 2007-05-16 12:18:15: Dome update Message-ID: Mike D. cleaned dome in HF/Nitric. Reassembled chamber with no problems. Last chamber leak rate test was 6.6 mT/min; need to be less than 5 mT/min. Will leave in Hot idle over night. Maurice will run a qual in the morning. From eenriquez at snf.stanford.edu Thu May 17 08:22:16 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 May 2007 08:22:16 -0700 Subject: Comment epi2 SNF 2007-05-17 08:22:16: Update Message-ID: Chamber leak rate this morning is 1.4 mT/ min (Good). Waiting for Maurice to run qual. From maurice at snf.stanford.edu Thu May 17 10:20:39 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 17 May 2007 10:20:39 -0700 Subject: Comment epi2 SNF 2007-05-17 10:20:39: Dome/Etch info Message-ID: The Dome (the top of the deposition chamber) was removed, acid cleaned and reinstalled yesterday. The system was baked and purged overnight. The system was leak checked this morning with a leak rate of 1.4 mT/min. This incident put the system down for more than a day. We will be inspecting the dome each working day (monday-friday) in the morning until further notice. The system will be shutdown if we see deposition on the dome. This is to keep the system from imploding. The length of all etch steps in the etch recipes has been tripled. We were surprised to see that the dome was coated since all users should be doing relativity thin layers. So either our etch recipes are not sufficient or users are growing layers thicker than they are admitting to depositing or users are using the wrong etch program. So: Etch after each processed wafer. If you are depositing Ge or SiGe with high Ge content then you must use the Ge etch recipe after each wafer. The Ge etch recipe is a low temp etch that will remove Ge. The other high temp etch recipe will cause the Ge to coat the dome. If you are doing thick SiGe or Ge deposition, come talk to me. Will will have to create a special etch recipe. The max Si deposition is 3um. From maurice at snf.stanford.edu Thu May 17 11:05:13 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 17 May 2007 11:05:13 -0700 Subject: Shutdown epi2 SNF 2007-05-17 11:05:12: lift cannot reach process position Message-ID: Wafer stuck in chamber A (unprocessed) From eenriquez at snf.stanford.edu Thu May 17 12:47:54 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 May 2007 12:47:54 -0700 Subject: Comment epi2 SNF 2007-05-17 08:22:16: Update Message-ID: From cbaxter at snf.stanford.edu Thu May 17 14:59:02 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 17 May 2007 14:59:02 -0700 Subject: Shutdown epi2 SNF 2007-05-17 11:05:12: lift cannot reach process position Message-ID: Speed up lifter speed from home to process and also changed constant wafer time out limit from 10 sec(default number) to 15sec. From maurice at snf.stanford.edu Thu May 17 15:43:06 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 17 May 2007 15:43:06 -0700 Subject: Problem epi2 SNF 2007-05-11 11:09:55: Top to Bottom Temp Control Message-ID: Temp difference was caused be coated dome. Dome was pulled and cleaned. Temps are back to normal. From maurice at snf.stanford.edu Thu May 17 15:43:20 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 17 May 2007 15:43:20 -0700 Subject: Comment epi2 SNF 2007-05-11 14:31:50: Heater lamps update Message-ID: logged From eenriquez at snf.stanford.edu Mon May 21 08:58:37 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 May 2007 08:58:37 -0700 Subject: Problem epi2 SNF 2007-05-21 08:58:37: Shutdown update Message-ID: Restarted the system. Chamber leak-up was 96 mT/min, spec is less than 5 mT/min. Placed chamber in Hot Idle. Will run another leak-up rate test in about 1 hour. From eenriquez at snf.stanford.edu Mon May 21 13:20:18 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 May 2007 13:20:18 -0700 Subject: Problem epi2 SNF 2007-05-21 08:58:37: Shutdown update Message-ID: Leak rate is 4.2 mT/min. From maurice at snf.stanford.edu Mon May 21 16:30:21 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 21 May 2007 16:30:21 -0700 Subject: Comment epi2 SNF 2007-05-21 16:30:21: Etched/coated,3um dep Message-ID: Etched/coated/3um dep/big etch Looks good after power outage From rshyam at snf.stanford.edu Tue May 22 18:01:09 2007 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Tue, 22 May 2007 18:01:09 -0700 Subject: Shutdown epi2 SNF 2007-05-22 18:01:08: "Chamber A air blower has no air flow" Message-ID: While going from cold idle to hot idle, it gave the error "Chamber A air blower has no air flow" and came back to cold idle. From eenriquez at snf.stanford.edu Wed May 23 07:32:09 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 May 2007 07:32:09 -0700 Subject: Shutdown epi2 SNF 2007-05-22 18:01:08: "Chamber A air blower has no air flow" Message-ID: Repositioned the air blower. Chamber is now in Hot idle. From jrjain at snf.stanford.edu Wed May 23 20:05:56 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Wed, 23 May 2007 20:05:56 -0700 Subject: Problem epi2 SNF 2007-05-23 20:05:55: Fatal Fault Message-ID: Chamber A lift cannot reach process position. Brought chamber down to inert idle, returned wafer to cooling station and then load lock, reset faults, and ran again (successfully). From nevran at snf.stanford.edu Thu May 24 00:35:56 2007 From: nevran at snf.stanford.edu (nevran at snf.stanford.edu) Date: Thu, 24 May 2007 00:35:56 -0700 Subject: Problem epi2 SNF 2007-05-24 00:35:56: Fatal Fault Message-ID: Gave same error again. "Chamber A lift cannot reach process position." From eenriquez at snf.stanford.edu Thu May 24 10:48:54 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 24 May 2007 10:48:54 -0700 Subject: Problem epi2 SNF 2007-05-23 20:05:55: Fatal Fault Message-ID: Noticed that the lifter took about 20- 32 sec to get into position after the system has sat idle for some time. After it has been cycled several times, it only took about 10 seconds. We think one of the solenoids is sticky. For now we increased the lifter fault time out to 40 seconds. From eenriquez at snf.stanford.edu Thu May 24 10:51:53 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 24 May 2007 10:51:53 -0700 Subject: Problem epi2 SNF 2007-05-24 00:35:56: Fatal Fault Message-ID: Noticed that the lifter took about 20- 32 sec to get into position after the system has sat idle for some time. After it has been cycled several times, it only took about 10 seconds. We think one of the solenoids is sticky. For now we increased the lifter fault time out to 40 seconds. From maurice at snf.stanford.edu Thu May 24 11:06:44 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 May 2007 11:06:44 -0700 Subject: Comment epi2 SNF 2007-05-21 16:30:21: Etched/coated,3um dep Message-ID: logged From jimbond at snf.stanford.edu Fri May 25 16:15:51 2007 From: jimbond at snf.stanford.edu (jimbond at snf.stanford.edu) Date: Fri, 25 May 2007 16:15:51 -0700 Subject: Comment epi2 SNF 2007-05-25 16:15:50: Temp diff Message-ID: Lower temp set at 400, during the process, the upper thermo decreased to less than 300 from 367 after about 10 min growth. From maurice at snf.stanford.edu Fri May 25 16:47:28 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 25 May 2007 16:47:28 -0700 Subject: Comment epi2 SNF 2007-05-25 16:47:28: Dome: clear Message-ID: Inspected dome after user jimbond completed 40min GE dep folloewd by 2x GeEtch. From eenriquez at snf.stanford.edu Tue May 29 09:14:00 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 29 May 2007 09:14:00 -0700 Subject: Shutdown epi2 SNF 2007-05-29 09:13:55: Wafer lift no going to process position Message-ID: From cbaxter at snf.stanford.edu Tue May 29 10:13:09 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 29 May 2007 10:13:09 -0700 Subject: Shutdown epi2 SNF 2007-05-29 09:13:55: Wafer lift no going to process position Message-ID: Adjusted lifter cylinder speed. From eenriquez at snf.stanford.edu Wed May 30 08:19:26 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 30 May 2007 08:19:26 -0700 Subject: Comment epi2 SNF 2007-05-30 08:19:25: Switched system control to front of system Message-ID: Moved the system control to the front of the system. Also removed wheels of the work table and cleaned up the area. From grahamab at snf.stanford.edu Wed May 30 20:21:23 2007 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Wed, 30 May 2007 20:21:23 -0700 Subject: Shutdown epi2 SNF 2007-05-30 20:21:22: wafer stuck inside Message-ID: wafer handling error in transfer chamber after process was complete. manual transfer to cooling chamber and load lock were unsuccessful. wafer is still inside somewhere. please put wafer in labeled waferbox near epi2. From eenriquez at snf.stanford.edu Thu May 31 08:04:13 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 31 May 2007 08:04:13 -0700 Subject: Shutdown epi2 SNF 2007-05-30 20:21:22: wafer stuck inside Message-ID: The wafer sensors in transfer chamber could not sense the wafer. It looks like the wafer was processed upside-down. Increased the sensor gain and unloaded the wafer. Adjusted gain back to original setting after the wafer was unloaded.