Shutdown epi2 SNF 2007-05-06 21:08:13: Wafer not on blade error

rwoo at rwoo at
Sun May 6 21:08:13 PDT 2007

'Wafer not on blade' error - system was trying to transfer wafer from LL-A to start processing.  LL-A to X-fer slit open so LL-A door cannot be opened.
Please move wafers (should be 13 in total) to plastic box on table.  Please try to handle carefully as these are important wafers!

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