Shutdown epi2 SNF 2007-05-06 21:08:13: Wafer not on blade error

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon May 7 12:18:25 PDT 2007


Unloaded user's wafers and placed them in his box.  Cycled 10 wafers but unable to duplicate the problem.  Maurice is cycling some more wafers.




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