Shutdown epi2 SNF 2007-05-08 19:31:00: Chamber A Bulb Failures

[nevran at snf.stanford.edu]

Faults during ETCHCOAT-CHA.
1) Chamber A failed to reach end condition for Step 4 (which is a Ramp to 1130 before bake)
2) Chamber A bulb failed in UPPER INNER zone after recipe aborted
3) Chamber A bulb failed in LOWER INNER zone