Shutdown epi2 SNF 2007-05-08 19:31:00: Chamber A Bulb Failures

nevran at snf.stanford.edu nevran at snf.stanford.edu
Tue May 8 19:31:01 PDT 2007


Faults during ETCHCOAT-CHA.
1) Chamber A failed to reach end condition for Step 4 (which is a Ramp to 1130 before bake)
2) Chamber A bulb failed in UPPER INNER zone after recipe aborted
3) Chamber A bulb failed in LOWER INNER zone




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