Shutdown epi2 SNF 2007-05-08 19:31:00: Chamber A Bulb Failures

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed May 9 10:18:16 PDT 2007


Lamps checked out ok.
System aborted...this turns off lamps...propram sees lamps off and reports lamp failure...a bug in the program?
The ramp step in the etch program is now  changed from a" timed" step to "hold in step until temp reached"




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