Shutdown epi2 SNF 2007-05-10 11:01:12: Chamber A Fault
jrjain at snf.stanford.edu
jrjain at snf.stanford.edu
Thu May 10 11:01:13 PDT 2007
Previous message:
Shutdown epi2 SNF 2007-05-08 19:31:00: Chamber A Bulb Failures
Next message:
Shutdown epi2 SNF 2007-05-10 11:01:12: Chamber A Fault
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
Main Scrubber Fault - Manual Gas Flows not allowed
Previous message:
Shutdown epi2 SNF 2007-05-08 19:31:00: Chamber A Bulb Failures
Next message:
Shutdown epi2 SNF 2007-05-10 11:01:12: Chamber A Fault
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
More information about the epi2-pcs mailing list