Problem epi2 SNF 2007-05-11 11:09:55: Top to Bottom Temp Control

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Fri May 11 11:09:55 PDT 2007


~15-35C temperature difference between top and bottom of wafer.  This is far too large and results in marked changes in dep rate, composition, and quality for SiGe films compared to previous runs.  Bulb tests should probably be done with some replaced.




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