Shutdown epi2 SNF 2007-05-15 13:33:39: inspecting lamps/dome coating

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed May 16 18:00:04 PDT 2007


Mike D. cleaned dome in HF/Nitric.  Reassembled chamber with no problems.  Last chamber leak rate test was 6.6 mT/min; need to be less than 5 mT/min.  Will leave in Hot idle over night.  Maurice will run a qual in the morning.




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