Shutdown epi2 SNF 2007-05-17 11:05:12: lift cannot reach process position
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Thu May 17 11:05:13 PDT 2007
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Comment epi2 SNF 2007-05-17 10:20:39: Dome/Etch info
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Shutdown epi2 SNF 2007-05-17 11:05:12: lift cannot reach process position
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Wafer stuck in chamber A (unprocessed)
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Comment epi2 SNF 2007-05-17 10:20:39: Dome/Etch info
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Shutdown epi2 SNF 2007-05-17 11:05:12: lift cannot reach process position
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