Shutdown epi2 SNF 2007-05-17 11:05:12: lift cannot reach process position

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu May 17 14:59:02 PDT 2007


Speed up lifter speed from home to process and also
changed constant wafer time out limit from 10 sec(default 
number) to 15sec.




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