Problem epi2 SNF 2007-05-21 08:58:37: Shutdown update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon May 21 08:58:37 PDT 2007


Restarted the system.  Chamber leak-up was 96 mT/min, spec is less than 5 mT/min.  Placed chamber in Hot Idle.  Will run another leak-up rate test in about 1 hour.




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