Problem epi2 SNF 2007-05-21 08:58:37: Shutdown update
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon May 21 08:58:37 PDT 2007
Restarted the system. Chamber leak-up was 96 mT/min, spec is less than 5 mT/min. Placed chamber in Hot Idle. Will run another leak-up rate test in about 1 hour.
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