Shutdown epi2 SNF 2007-05-22 18:01:08: "Chamber A air blower has no air flow"

rshyam at snf.stanford.edu rshyam at snf.stanford.edu
Tue May 22 18:01:09 PDT 2007


While going from cold idle to hot idle, it gave the error "Chamber A air blower has no air flow" and came back to cold idle.




More information about the epi2-pcs mailing list