Shutdown epi2 SNF 2007-05-22 18:01:08: "Chamber A air blower has no air flow"
rshyam at snf.stanford.edu
rshyam at snf.stanford.edu
Tue May 22 18:01:09 PDT 2007
While going from cold idle to hot idle, it gave the error "Chamber A air blower has no air flow" and came back to cold idle.
More information about the epi2-pcs
mailing list