Problem epi2 SNF 2007-05-23 20:05:55: Fatal Fault

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Wed May 23 20:05:56 PDT 2007


Chamber A lift cannot reach process position.
Brought chamber down to inert idle, returned wafer to cooling station and then load lock, reset faults, and ran again (successfully).




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