Shutdown epi2 SNF 2007-05-30 20:21:22: wafer stuck inside

grahamab at grahamab at
Wed May 30 20:21:23 PDT 2007

wafer handling error in transfer chamber after process was complete.  manual transfer to cooling chamber and load lock were unsuccessful.  wafer is still inside somewhere.  please put wafer in labeled waferbox near epi2.  

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