Shutdown epi2 SNF 2007-05-30 20:21:22: wafer stuck inside

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Wed May 30 20:21:23 PDT 2007


wafer handling error in transfer chamber after process was complete.  manual transfer to cooling chamber and load lock were unsuccessful.  wafer is still inside somewhere.  please put wafer in labeled waferbox near epi2.  




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