Shutdown epi2 SNF 2007-05-30 20:21:22: wafer stuck inside

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu May 31 08:04:13 PDT 2007


The wafer sensors in transfer chamber could not sense the wafer.  It looks like the wafer was processed upside-down.  Increased the sensor gain and unloaded the wafer.  Adjusted gain back to original setting after the wafer was unloaded.




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