May 2007 Archives by date

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Starting: Tue May 1 08:57:40 PDT 2007
Ending: Thu May 31 08:04:13 PDT 2007
Messages: 46

• Shutdown epi2 SNF 2007-05-01 08:57:39: Burnbox problem   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2007-05-02 18:54:23: Update   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2007-05-01 08:57:39: Burnbox problem   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2007-05-02 18:54:23: Update   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2007-04-30 14:09:26: User is testing the system   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2007-05-06 21:08:13: Wafer not on blade error   rwoo at snf.stanford.edu
• Shutdown epi2 SNF 2007-05-06 21:08:13: Wafer not on blade error   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2007-05-08 19:31:00: Chamber A Bulb Failures   nevran at snf.stanford.edu
• Shutdown epi2 SNF 2007-05-08 19:31:00: Chamber A Bulb Failures   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2007-05-10 11:01:12: Chamber A Fault   jrjain at snf.stanford.edu
• Shutdown epi2 SNF 2007-05-10 11:01:12: Chamber A Fault   maurice at snf.stanford.edu
• Problem epi2 SNF 2007-05-10 19:10:52: need clip for quartz wand   rwoo at snf.stanford.edu
• Problem epi2 SNF 2007-05-11 11:09:55: Top to Bottom Temp Control   jrjain at snf.stanford.edu
• Problem epi2 SNF 2007-05-10 19:10:52: need clip for quartz wand   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2007-05-11 14:31:50: Heater lamps update   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2007-05-15 13:33:39: inspecting lamps/dome coating   maurice at snf.stanford.edu
• Comment epi2 SNF 2007-05-15 16:15:10: Dome coated   maurice at snf.stanford.edu
• Comment epi2 SNF 2007-05-16 12:18:15: Dome update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2007-04-23 22:50:16: 2 wafers in LL B   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2007-05-15 13:33:39: inspecting lamps/dome coating   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2007-05-15 16:15:10: Dome coated   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2007-05-16 12:18:15: Dome update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2007-05-17 08:22:16: Update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2007-05-17 10:20:39: Dome/Etch info   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2007-05-17 11:05:12: lift cannot reach process position   maurice at snf.stanford.edu
• Comment epi2 SNF 2007-05-17 08:22:16: Update   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2007-05-17 11:05:12: lift cannot reach process position   cbaxter at snf.stanford.edu
• Problem epi2 SNF 2007-05-11 11:09:55: Top to Bottom Temp Control   maurice at snf.stanford.edu
• Comment epi2 SNF 2007-05-11 14:31:50: Heater lamps update   maurice at snf.stanford.edu
• Problem epi2 SNF 2007-05-21 08:58:37: Shutdown update   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2007-05-21 08:58:37: Shutdown update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2007-05-21 16:30:21: Etched/coated,3um dep   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2007-05-22 18:01:08: "Chamber A air blower has no air flow"   rshyam at snf.stanford.edu
• Shutdown epi2 SNF 2007-05-22 18:01:08: "Chamber A air blower has no air flow"   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2007-05-23 20:05:55: Fatal Fault   jrjain at snf.stanford.edu
• Problem epi2 SNF 2007-05-24 00:35:56: Fatal Fault   nevran at snf.stanford.edu
• Problem epi2 SNF 2007-05-23 20:05:55: Fatal Fault   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2007-05-24 00:35:56: Fatal Fault   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2007-05-21 16:30:21: Etched/coated,3um dep   maurice at snf.stanford.edu
• Comment epi2 SNF 2007-05-25 16:15:50: Temp diff   jimbond at snf.stanford.edu
• Comment epi2 SNF 2007-05-25 16:47:28: Dome: clear   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2007-05-29 09:13:55: Wafer lift no going to process position   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2007-05-29 09:13:55: Wafer lift no going to process position   cbaxter at snf.stanford.edu
• Comment epi2 SNF 2007-05-30 08:19:25: Switched system control to front of system   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2007-05-30 20:21:22: wafer stuck inside   grahamab at snf.stanford.edu
• Shutdown epi2 SNF 2007-05-30 20:21:22: wafer stuck inside   eenriquez at snf.stanford.edu

Last message date: Thu May 31 08:04:13 PDT 2007
Archived on: Sun Dec 23 08:52:45 PST 2012

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