From eenriquez at snf.stanford.edu Fri Nov 2 08:41:44 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 2 Nov 2007 08:41:44 -0700 Subject: Comment epi2 SNF 2007-11-02 08:41:43: HCl panel update Message-ID: While testing the panel yesterday, we discovered that a valve did not have the proper rating for this application. Vendor is currently repairing the panel. Panel will be on-site by 10am. We should have HCl available by 2 pm today. From eenriquez at snf.stanford.edu Fri Nov 2 14:21:26 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 2 Nov 2007 14:21:26 -0700 Subject: Comment epi2 SNF 2007-11-02 08:41:43: HCl panel update Message-ID: HCl is back on. From maurice at snf.stanford.edu Fri Nov 2 14:46:29 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 2 Nov 2007 14:46:29 -0700 Subject: Problem epi2 SNF 2007-10-26 10:59:40: H2 anneals only!! No Depositions. Message-ID: Installed new HCl panel and purge. HCl is now back on. From maurice at snf.stanford.edu Fri Nov 2 14:46:43 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 2 Nov 2007 14:46:43 -0700 Subject: Comment epi2 SNF 2007-10-24 18:33:55: HCl gas panel is non functional Message-ID: Installed new HCl panel and purge. HCl is now back on. From maurice at snf.stanford.edu Fri Nov 2 14:47:02 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 2 Nov 2007 14:47:02 -0700 Subject: Comment epi2 SNF 2007-10-18 07:31:35: HCl cylinder changed Message-ID: logged From masaharu at snf.stanford.edu Sun Nov 4 12:28:59 2007 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sun, 4 Nov 2007 12:28:59 -0800 Subject: Problem epi2 SNF 2007-11-04 12:28:59: chamber A pump valve not work? Message-ID: When I started my first run, I saw the error: "Chamber A pressure setpoint deviation fault". And system went to isolated. I tried to recover from isolated to online and run recipe again, But I saw the same error every time. From skoh at snf.stanford.edu Mon Nov 5 12:22:23 2007 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Mon, 5 Nov 2007 12:22:23 -0800 Subject: Problem epi2 SNF 2007-11-05 12:22:22: Pressure Setpoint deviation fault Message-ID: Got this error twice, causing the system to go into isolated mode both times. It appears that the chamber is unable to pump down to 10T, only able to reach around 11T, before getting the deviation fault. From eenriquez at snf.stanford.edu Tue Nov 6 11:55:31 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 6 Nov 2007 11:55:31 -0800 Subject: Comment epi2 SNF 2007-11-06 11:55:31: Update pressure deviation Message-ID: It appears that the pressure control valve is not reacting quickly enough in adjusting to the pressure set point. Need to adjust the pressure PID values. From renshen at snf.stanford.edu Wed Nov 7 17:29:57 2007 From: renshen at snf.stanford.edu (renshen at snf.stanford.edu) Date: Wed, 7 Nov 2007 17:29:57 -0800 Subject: Shutdown epi2 SNF 2007-11-07 17:29:56: Main Scrubber fault Message-ID: From renshen at snf.stanford.edu Wed Nov 7 17:33:26 2007 From: renshen at snf.stanford.edu (renshen at snf.stanford.edu) Date: Wed, 7 Nov 2007 17:33:26 -0800 Subject: Comment epi2 SNF 2007-11-07 17:33:26: Wafer stuck Message-ID: My wafer is stuck inside the reaction chamber during the main scrubber fault. I cannot get it out. Please help me unload it when it is up. I put a wafer box with a notice on the desk beside the tool. Thanks. From eenriquez at snf.stanford.edu Thu Nov 8 07:58:43 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Nov 2007 07:58:43 -0800 Subject: Comment epi2 SNF 2007-11-08 07:58:43: Update scrubber fault Message-ID: One of the house scrubbers went down last night. This lowered the house exhaust pressure enough to trip the EPI burn box and not allow it to run. Facility re-started the house scrubber. I restarted EPI burn box. Now unloading the user's wafer. From eenriquez at snf.stanford.edu Thu Nov 8 11:15:40 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Nov 2007 11:15:40 -0800 Subject: Shutdown epi2 SNF 2007-11-07 17:29:56: Main Scrubber fault Message-ID: One of the 2 house scrubbers shut -off last night. Facilities personeel re-started the scrubber. We reset the EPI scrubber and unloaded the users wafer. From eenriquez at snf.stanford.edu Thu Nov 8 11:17:13 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Nov 2007 11:17:13 -0800 Subject: Comment epi2 SNF 2007-11-07 17:33:26: Wafer stuck Message-ID: Unloaded user's wafer From eenriquez at snf.stanford.edu Thu Nov 8 11:17:34 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Nov 2007 11:17:34 -0800 Subject: Comment epi2 SNF 2007-11-08 07:58:43: Update scrubber fault Message-ID: From eenriquez at snf.stanford.edu Thu Nov 8 14:43:49 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Nov 2007 14:43:49 -0800 Subject: Comment epi2 SNF 2007-11-08 14:43:49: HCl cylinder change Message-ID: From eenriquez at snf.stanford.edu Thu Nov 8 14:44:12 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Nov 2007 14:44:12 -0800 Subject: Comment epi2 SNF 2007-11-08 14:43:49: HCl cylinder change Message-ID: HCl cylinder change completed From maurice at snf.stanford.edu Fri Nov 9 15:19:47 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 Nov 2007 15:19:47 -0800 Subject: Shutdown epi2 SNF 2007-11-09 15:19:46: Vacuum pump over pressure Message-ID: After running the third wafer (all the same recipe) the reactor shutdown in the middle of the 4th deposition. Vaccum pump over pressure or over temp Hazard warning EXH at ATM Foreline pressure greater than ATM From eenriquez at snf.stanford.edu Mon Nov 12 11:55:56 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Nov 2007 11:55:56 -0800 Subject: Comment epi2 SNF 2007-11-12 11:55:56: Vacuum pump update Message-ID: The pump's stop button is stuck on. Unable to clear the alarm. Pump field service will be here around 1pm. From eenriquez at snf.stanford.edu Mon Nov 12 14:19:27 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Nov 2007 14:19:27 -0800 Subject: Shutdown epi2 SNF 2007-11-09 15:19:46: Vacuum pump over pressure Message-ID: Field service found a defective interlock jumper inside the pump package. Replaced jumper and restarted the pump. User's wafer is in loadlock A. Left yhe chamber in Hot idle. From eenriquez at snf.stanford.edu Mon Nov 12 14:19:44 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Nov 2007 14:19:44 -0800 Subject: Comment epi2 SNF 2007-11-12 11:55:56: Vacuum pump update Message-ID: Field service found a defective interlock jumper inside the pump package. Replaced jumper and restarted the pump. User's wafer is in loadlock A. Left yhe chamber in Hot idle. From eenriquez at snf.stanford.edu Tue Nov 13 13:50:59 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Nov 2007 13:50:59 -0800 Subject: Shutdown epi2 SNF 2007-11-13 13:50:56: House scrubber is down Message-ID: From eenriquez at snf.stanford.edu Tue Nov 13 14:29:52 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Nov 2007 14:29:52 -0800 Subject: Shutdown epi2 SNF 2007-11-13 13:50:56: House scrubber is down Message-ID: Facilities restarted the scrubber. EPI scrubber and burnbox is also up From eenriquez at snf.stanford.edu Thu Nov 15 10:18:19 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 Nov 2007 10:18:19 -0800 Subject: Comment epi2 SNF 2007-11-15 10:18:18: Changed HCl cylinder Message-ID: From yuhykr at snf.stanford.edu Fri Nov 16 09:53:03 2007 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Fri, 16 Nov 2007 09:53:03 -0800 Subject: Problem epi2 SNF 2007-11-16 09:53:02: Hazzy Message-ID: My result is very hazzy with same recipe This recipe worked fine before. From eenriquez at snf.stanford.edu Mon Nov 19 14:55:03 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 19 Nov 2007 14:55:03 -0800 Subject: Comment epi2 SNF 2007-11-19 14:55:02: Completed HCl cylinder change Message-ID: From maurice at snf.stanford.edu Tue Nov 20 18:19:29 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 20 Nov 2007 18:19:29 -0800 Subject: Shutdown epi2 SNF 2007-11-20 18:19:29: dome coated/particles on glass Message-ID: Ran two etches...it did not help From eenriquez at snf.stanford.edu Wed Nov 21 08:46:54 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Nov 2007 08:46:54 -0800 Subject: Comment epi2 SNF 2007-11-21 08:46:54: Susceptor coated; Dome OK Message-ID: Looks like the susceptor is coated and has a few particles. Will discuss with Maurice if we can clean the susceptor in situ. From eenriquez at snf.stanford.edu Wed Nov 21 10:35:55 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Nov 2007 10:35:55 -0800 Subject: Shutdown epi2 SNF 2007-11-20 18:19:29: dome coated/particles on glass Message-ID: Dome coating is not that bad. Maurice and I decided to let it release the tool. We will clean the dome on Tuesday. From maurice at snf.stanford.edu Wed Nov 21 11:19:37 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 21 Nov 2007 11:19:37 -0800 Subject: Shutdown epi2 SNF 2007-11-21 11:19:37: Pinhole in the susceptor Message-ID: One user is finding haze on his Ge depositions. We inspected the dome and found it has light haze on it. We also found a spot on the susceptor that looks like a pinhole. A pinhole pan cause haze and cross contamination. From eenriquez at snf.stanford.edu Mon Nov 26 14:50:08 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 26 Nov 2007 14:50:08 -0800 Subject: Comment epi2 SNF 2007-11-26 14:50:07: Update on susceptor change Message-ID: Removed exhaust assembly and dome clamp. need to remove the dome and replace susceptor. From eenriquez at snf.stanford.edu Tue Nov 27 14:41:44 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 Nov 2007 14:41:44 -0800 Subject: Comment epi2 SNF 2007-11-27 14:41:44: Update on susceptor change Message-ID: Had problems with the new dome. Mike cleaned the old dome. We will installs it along with a brand new susceptor tomorrow. From maurice at snf.stanford.edu Wed Nov 28 18:03:30 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 Nov 2007 18:03:30 -0800 Subject: Shutdown epi2 SNF 2007-11-21 11:19:37: Pinhole in the susceptor Message-ID: We havethe new susceptor and the cleaned doom in place. We have run a few runs that are coming out with haze. Each run looks a little better than the previous. The base is a little high. We expect 1.0 torr but we are only reaching 1.52torr. The haze and the high base are not unusual for a system that has been at atm for a couple of days. We will continue to bake the system and run wafers to get rid of the haze/ high base. From maurice at snf.stanford.edu Wed Nov 28 18:04:22 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 Nov 2007 18:04:22 -0800 Subject: Shutdown epi2 SNF 2007-11-28 18:04:22: Haze Message-ID: Elmer has new susceptor and the cleaned doom in place. We have run a few runs that are coming out with haze. Each run looks a little better than the previous. The base is a little high. We expect 1.0 torr but we are only reaching 1.52torr. The haze and the high base are not unusual for a system that has been at atm for a couple of days. We will continue to bake the system and run wafers to get rid of the haze/ high base. From maurice at snf.stanford.edu Wed Nov 28 18:05:07 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 Nov 2007 18:05:07 -0800 Subject: Problem epi2 SNF 2007-11-16 09:53:02: Hazzy Message-ID: replaced pinholed suceptor From maurice at snf.stanford.edu Wed Nov 28 18:05:28 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 Nov 2007 18:05:28 -0800 Subject: Comment epi2 SNF 2007-10-12 15:48:54: dome clear Message-ID: logged From maurice at snf.stanford.edu Wed Nov 28 18:05:46 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 28 Nov 2007 18:05:46 -0800 Subject: Comment epi2 SNF 2007-11-19 14:55:02: Completed HCl cylinder change Message-ID: logged From maurice at snf.stanford.edu Thu Nov 29 10:45:20 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 29 Nov 2007 10:45:20 -0800 Subject: Shutdown epi2 SNF 2007-11-29 10:45:19: Broken wafer pin lifter/blade Message-ID: On our fifth haze test wafer it appears that one of the three wafer lift pin stuck (jammed, got bound, got stuck, ...didn't lift). This broke one of the three legs of the pin lifter. It also tilted the susceptor and caused the wafer blade to break. We are checking our inventory for spares and investigating having some parts firepolished so the don't bind.