Problem epi2 SNF 2007-11-04 12:28:59: chamber A pump valve not work?

masaharu at snf.stanford.edu masaharu at snf.stanford.edu
Sun Nov 4 12:28:59 PST 2007


When I started my first run,
I saw the error:
"Chamber A pressure setpoint deviation fault".
And system went to isolated.
I tried to recover from isolated to online and run recipe again,
But I saw the same error every time.




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