Problem epi2 SNF 2007-11-05 12:22:22: Pressure Setpoint deviation fault

skoh at snf.stanford.edu skoh at snf.stanford.edu
Mon Nov 5 12:22:23 PST 2007


Got this error twice, causing the system to go into isolated mode both times.  It appears that the chamber is unable to pump down to 10T, only able to reach around 11T, before getting the deviation fault.




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