Problem epi2 SNF 2007-11-05 12:22:22: Pressure Setpoint deviation fault

skoh at skoh at
Mon Nov 5 12:22:23 PST 2007

Got this error twice, causing the system to go into isolated mode both times.  It appears that the chamber is unable to pump down to 10T, only able to reach around 11T, before getting the deviation fault.

More information about the epi2-pcs mailing list