Comment epi2 SNF 2007-11-07 17:33:26: Wafer stuck

renshen at snf.stanford.edu renshen at snf.stanford.edu
Wed Nov 7 17:33:26 PST 2007


My wafer is stuck inside the reaction chamber during the main scrubber fault. I cannot get it out. Please help me unload it when it is up. I put a wafer box with a notice on the desk beside the tool. Thanks.




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