Comment epi2 SNF 2007-11-08 07:58:43: Update scrubber fault

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Nov 8 07:58:43 PST 2007


One of the house scrubbers went down last night.  This lowered the house exhaust pressure enough to trip the EPI burn box and not allow it to run.  Facility re-started the house scrubber.  I restarted EPI  burn box.  Now unloading the user's wafer.




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