Shutdown epi2 SNF 2007-11-07 17:29:56: Main Scrubber fault

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Nov 8 11:15:40 PST 2007


One of the 2 house scrubbers shut -off last night.  Facilities personeel re-started the scrubber.  We reset the EPI scrubber and unloaded the users wafer.  




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