Shutdown epi2 SNF 2007-11-09 15:19:46: Vacuum pump over pressure

maurice at maurice at
Fri Nov 9 15:19:47 PST 2007

After running the third wafer (all the same recipe) the reactor shutdown in the middle of the 4th deposition.
Vaccum pump over pressure or over temp
Hazard warning EXH at ATM
Foreline pressure greater than ATM

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