Shutdown epi2 SNF 2007-11-09 15:19:46: Vacuum pump over pressure

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Nov 9 15:19:47 PST 2007


After running the third wafer (all the same recipe) the reactor shutdown in the middle of the 4th deposition.
Vaccum pump over pressure or over temp
Hazard warning EXH at ATM
Foreline pressure greater than ATM




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