Shutdown epi2 SNF 2007-11-09 15:19:46: Vacuum pump over pressure

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Nov 12 14:19:27 PST 2007

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Field service found a defective interlock jumper inside the pump package.  Replaced jumper and restarted the pump.  User's wafer is in loadlock A.  Left yhe chamber in Hot idle.

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