Comment epi2 SNF 2007-11-12 11:55:56: Vacuum pump update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Nov 12 14:19:44 PST 2007


Field service found a defective interlock jumper inside the pump package.  Replaced jumper and restarted the pump.  User's wafer is in loadlock A.  Left yhe chamber in Hot idle.




More information about the epi2-pcs mailing list