Shutdown epi2 SNF 2007-11-20 18:19:29: dome coated/particles on glass
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Tue Nov 20 18:19:29 PST 2007
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Comment epi2 SNF 2007-11-19 14:55:02: Completed HCl cylinder change
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Shutdown epi2 SNF 2007-11-20 18:19:29: dome coated/particles on glass
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Ran two etches...it did not help
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Comment epi2 SNF 2007-11-19 14:55:02: Completed HCl cylinder change
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Shutdown epi2 SNF 2007-11-20 18:19:29: dome coated/particles on glass
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