Comment epi2 SNF 2007-11-21 08:46:54: Susceptor coated; Dome OK
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Nov 21 08:46:54 PST 2007
Looks like the susceptor is coated and has a few particles. Will discuss with Maurice if we can clean the susceptor in situ.
More information about the epi2-pcs
mailing list