Shutdown epi2 SNF 2007-11-21 11:19:37: Pinhole in the susceptor

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Nov 21 11:19:37 PST 2007


One user is finding haze on his Ge depositions.  We inspected the dome and found it has light  haze on it.  We also found a spot on the susceptor that looks like a pinhole.  
A pinhole pan cause haze and cross contamination. 




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