Shutdown epi2 SNF 2007-11-21 11:19:37: Pinhole in the susceptor

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Nov 28 18:03:30 PST 2007


We havethe  new susceptor and the cleaned doom in place. 
We have run a few runs that are coming out with haze.  Each run looks a little better than the previous.  The base is a little high.  We expect 1.0 torr but we are only reaching 1.52torr.  The haze and the high base are not unusual for a system that has been at atm for a couple of days.
We will continue to bake the system and run wafers to get rid of the haze/ high base.




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