Shutdown epi2 SNF 2007-11-29 10:45:19: Broken wafer pin lifter/blade

maurice at snf.stanford.edu maurice at snf.stanford.edu
Thu Nov 29 10:45:20 PST 2007


On our fifth haze test wafer it appears that one of the three  wafer lift pin stuck (jammed, got bound, got stuck, ...didn't lift).  This broke one of the three legs of the pin lifter.  It also tilted the susceptor and caused the wafer blade to break.
We are checking our inventory for spares and investigating having some parts firepolished so the don't bind.




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